The HJ-IBC solar cell. The HJ-IBC solar cell was fabricated using an n-type Czochralski crystalline 6 inch Si wafer with a size of 239 cm2, a thickness of about 165 m, and a resistivity of 3cm. The front wafer surface was textured by anisotropic etching to minimize the light reflection. From the weight measurement before the metallization process, we clarify the thickness of the wafer to be 165 m. Rear side passivation is done by a P+ HJ layer stack(i:a-Si layer deposition followed by p:a-Si layer deposition) and a N+ HJ layer stack (i:a-Si layer deposition followed by n-type thin-film Si layer deposition) by using a capacitively coupled RF PECVD tool. The front passivation is done by the a-Si layer followed by the first dielectric AR layer deposition using the same PECVD tool as used for the rear side. Additionally, a second dielectric AR layer is deposited on the first dielectric layer to minimize the reflection at the front surface of the HJ-IBC cell in air. The P+ and N+ HJ layer stacks are patterned into an interdigitated design on the rear surface. The rear interdigitated pattern is optimized to minimize the series resistance and the recombination. The electrodes are formed on both p:a-Si and n:a-Si layers to form good ohmic contact.there are no high-temperature (