2.4.19All utilities for gas-related equipment within gas rooms, BSGSrooms and SiH4 room shall be included as scope of work2.4.20 For antirust and safety concern, Contract shall to install doublewall piping w/ stop spacer and PT (ink to GIS )to protect thepiping containing pyrophoric gases between gas trench fromBSGS (gas cabinet/rack) to Fab/CUP such/ as SiH4, Si2H6 andMMS mixture etc2.4.21 For antirust and safety concern contract shall to install doublewall piping w/ stop spacer and Pt (link to GIs) to protect thepiping containing flammable and oxidative gases between gastrench from BSGs (trench start)to Fab/CUP such as PH2, N2ONF3 and 1O2 etc2.4.22 The wiring of flame detectors for the Silane/ Disilane purgingpanels in BSGS should be Class 1 Division 2 locations (i.e. cablesealed at the enclosure and has continuous gas/vapour-tightsheath)