Customer agree to revise design to meet RA improvement
Follow below details as discussed with ED
1. Process type is 8 inch wafer PI1 + RDL + PI2 + Cu Pillar bump
2. Layer definition as below
- L168 is final metal
- L9 is PO
- L190 is RDL target, use bias -1 um
- L191 is UBM, use bias -8 um
- L192 is PI1, use bias -1 pull-out from die edge 5um per side
- L193 is PI2, use bias -1 pull in from PI1 frame by 10um per side
3. UBM is target octagon shape, bias -8 um
4. PI1 and PI2 are bottom value, bias -1 um
5. PI1 opening shape change from octagon to oblong, follow same X,Y dimension
6. PI2 opening shape change from octagon to circle, follow same X,Y dimension
7. Die size is 3150*1300um
8. Chamfer by 15um arc all RDLwith 90 degress angle