Substrate effects on the mechanical

Substrate effects on the mechanical properties and contact damage of diamond-like carbon (DLC) films have been investigated. To that end, a DLC film of 1 μm thickness was deposited on two different substrates: soda–lime glass (compliant and soft), and single-crystal silicon (stiff and hard). The elastic modulus and hardness were measured by means of nanoindentation. Quasi-static and sliding contact configurations were simulated by means of ultra-micro indentation, and surface and cross-sectional damage were assessed using a focused ion beam (FIB) miller. It was found that a compliant and soft substrate enhances crack initiation on the film surface in the form of ring/cone cracks. On the other hand, a stiff and hard substrate delays crack initiation in the film, but is more susceptible to fracture in the form of median and lateral cracks due to increased brittleness. The results have implications for the reliability of DLC-coated systems.

結果 (繁體中文) 1:

對機械性能和類金剛石碳（DLC）膜的接觸損傷襯底效應進行了研究。為此目的，1微米厚的DLC膜沉積在兩個不同底物：鈉鈣玻璃（符合和軟），以及單晶矽（剛性，硬質）。彈性模量和硬度分別通過納米壓痕法進行測定。準靜態和滑動接觸配置，通過超微壓痕裝置模擬，使用聚焦離子束（FIB）米勒表面和橫截面的損傷進行了評估。據發現，柔順和柔軟基材增強抗裂膜表面上開始在環/錐形裂縫的形式。在另一方面，剛性和硬質基板的延遲膜中裂紋萌生，但更容易受到在中間和橫向裂紋的形式斷裂由於增加的脆性。結果對DLC塗覆系統的可靠性問題。

結果 (繁體中文) 2:

ด้วยการแจกแจงทั่วโลก

結果 (繁體中文) 3:

研究了襯底對類金剛石薄膜力學性能和接觸損傷的影響。為此，在兩種不同的基底上沉積了1μm厚的DLC薄膜：鈉鈣玻璃（柔韌）和單晶矽（堅硬）。用納米壓痕法量測了資料的彈性模量和硬度。利用超顯微壓痕科技類比了准靜態和滑動接觸形態，並用聚焦離子束（FIB）miller對表面和橫截面損傷進行了評估。結果表明，柔順的軟基片以環形/錐形裂紋的形式促進了薄膜表面裂紋的萌生。另一方面，堅硬的基底延遲了薄膜中的裂紋萌生，但由於脆性新增，更容易以中間裂紋和側向裂紋的形式斷裂。研究結果對DLC塗層系統的可靠性有一定的指導意義。