However,the pressure increased again at a high temperature of about 900 °C, and the resistance of the heater decreased markedly.It was speculated that the decrease of resistance was caused by the reaction between MoSi2 thin film and Pt, whereby platinum silicide (PtSi) was generated. Because no peculiar phenomena such as a decrease in resistance were observed on repetition of heating to 1000 °C, heating was repeated to 1300 °C. This R–T characteristic is shown in Fig. 4. As in the first process of heating to 1000 °C, the resistance decreased rapidly at approximately 1000 °C in the first process of heating up to 1300 °C.