To investigate evaporation from the

To investigate evaporation from the crucible, a quartz-crystal-vibration-type film thickness sensor was placed approximately 50 mm from a MoSi2 thin film heater. However, contamination due to evaporation from the heater materials was not detected. Thus, it appears that the amount of evaporation from the heater materials is nominal. Furthermore, compared with the temperature inside the crucible measured with a thermocouple, the surface temperature of MoSi2 thin films, measured with a radiation thermometer, was more than 100 °C higher.

結果 (中文) 1:

探讨从坩埚蒸发，石英晶体振型薄膜厚度传感器放置约50毫米的MoSi2薄膜加热器。然而，污染由于蒸发从加热器材料没有检测到。因此，它似乎从加热器材料的蒸发量的名义。此外，内用热电偶测量坩埚温度相比，MoSi2薄膜表面的温度，用辐射温度计测量，超过100°C高。

結果 (中文) 2:

调查从坩埚蒸发、 一种石英晶体振动式薄膜厚度传感器放 MoSi2 薄膜加热器从大约 50 毫米。然而，由于从加热器材料蒸发污染未检测到。因此，看来是名义上的加热器材料的蒸发量。此外，MoSi2 薄膜，用一个辐射温度计测量的表面温度与内部坩埚用热电偶测量温度相比，是超过 100 ° C 更高。