1. The reactor is initially evacuated to 1000 mtorr
2. After evacuation, a pressure test is conducted. The reactor and ancillary piping is pressurized with nitrogen to approximately 14.5 psig. When the set pressure is achieved, the gas temperature is allowed to stabilize and the reactor pressure is checked. The reactor pressure must not change more than 0.08 psi in ten minutes and the N3 loop pressure must not exceed 8 psig.
3. After the leak test, the reactor is depressurized to approximately 2 psig.
4. Following depressurization the reactor undergoes a vacuum test. The reactor is evacuated to 950 mtorr by the vacuum cart. When the vacuum test pressure (950 mtorr) is reached, the reactor is blocked in for at least five minutes. The reactor pressure must not change more than 30 mtorr during this time. The Process Vacuum Cart is then disconnected and the vacuum flange is installed.
Step