9、真空机组：采用二级泵配置，由1台2X-30旋片式机械泵配真空压差阀

9、真空机组：采用二级泵配置，由1台2X-30旋片式机械泵配真空压差阀（防止真空泵油因突然停电而倒灌），1台TK-200凸腔式扩散泵配冷阱（防油蒸汽进入炉腔）、壹个借鉴德国莱宝公司结构的过滤器、1个Φ200气动高真空挡板阀、2个Φ50气动真空蝶阀、1个真空压力表、1个充气阀、1个放气阀等组成，泵与真空管道的联接采用金属波纹软管快速联接（减缓震动），真空度的测量由数显复合真空计执行。

結果 (英文) 1:

9, the vacuum unit: the use of two pump configuration, by 1 2x-30 mechanical rotary vane vacuum pump with pressure valve (to prevent vacuum pump oil due to a sudden power outage intrusion), 1 tk-200 diffusion pump convex cavity with cold wells (oil vapor into the furnace chamber), and then one a draw Leybold company structure filters, a Φ200 pneumatic high vacuum baffle valve, two Φ50 pneumatic vacuum valve, a vacuum gauge, a filling valve, a release valve and other components, pumps and vacuum pipe joints with metal corrugated hose quick coupling (slow motion), measured by the vacuum gauge digital composite execution.

結果 (英文) 2:

9, the vacuum unit: the two stage pump configuration, composed of 1 2X-30 rotary vane pump with vacuum differential pressure valve (to prevent the vacuum pump oil due to a sudden power outage and absorb), 1 TK-200 convex cavity type diffusion pump with a cold trap (anti oil steam into the furnace chamber), a reference to the German filter, LEYBOLD company structure of 1 Phi 200 pneumatic high vacuum flapper valve, 2 Phi 50 pneumatic high vacuum butterfly valve, 1 vacuum pressure gauge, 1 air valve, 1 bleed valve, connected to the pump and vacuum pipe with corrugated metal hose quick coupling (slow motion), vacuum measure by digital composite vacuum gage execution.

結果 (英文) 3:

9, and vacuum unit: used two level pump configuration, by 1 Taiwan 2X-30 spin film type mechanical pump equipped with vacuum pressure poor valve (prevent vacuum pump oil for suddenly blackout and flooding), 1 Taiwan TK-200 convex cavity type spread pump equipped with cold trap (anti-oil steam into furnace cavity), and one a reference Germany Rai treasure company structure of filter device, and one φ 200 pneumatic high vacuum bezel valve, and 2 a φ 50 pneumatic vacuum butterfly valve, and one vacuum pressure table, and one inflatable valve, and one put valve, consists of, Pump and the vacuum piping system joins metal corrugated hose quick joint (slow vibrations), vacuum measurement is performed by complex vacuum meter with digital display.