本計畫目標為利用微機電技術開發具滲透效應之高靈敏度絕對壓力感測器。感測

本計畫目標為利用微機電技術開發具滲透效應之高靈敏度絕對壓力感測器。感測器的組成主要包含兩大部分，其一為整合壓力敏感高深寬比纖毛之感測單元，另一部份則是滲透效應奈米粒子薄膜。提出之創新的元件預計具有高靈敏度、高動態範圍與快速響應時間等優勢。感測器採用之具高深寬比磁性纖毛陣列將以磁流體技術實現，本研究團隊亦初步掌握纖毛陣列之製作技術，並剛發表於微機電領域最佳研討會MEMS 2020，本計畫將更進一步優化纖毛陣列之微結構。纖毛陣列可放大壓力變化所造成的結構形變，因此將大幅提高感測器偵測壓力之靈敏度。感測器的參考壓力之密封腔體與其訊號電極薄膜，將採用傳統之微機電製程製作。為了使纖毛具備最佳的滲透效應以大幅提高靈敏度與解析度，本計畫亦將開發在纖毛上沉積導電粒子之技術，包括奈米粒子噴塗技術與奈米金屬團簇技術，並將對與兩種不同方法生成之導電粒子的感測效應進行比較。此外，本計畫除了將自行組裝一簡易之奈米碳管粒子噴塗所需之超音波塗佈系統，並將開發一創新客製化的氣體凝聚源系統，以實現濺射均勻之奈米顆粒薄膜。得力於感測單元之纖毛微結構與滲透效應奈米薄膜，本計畫所提出之創新元件除了具有極高的靈敏度、廣泛的壓力檢測範圍、較低的壓力可檢測極限，也擁有響應時間快速和可恢復性及耐用性佳等優勢，將滿足各領域應用的需求，包括穿戴式電子裝置、絕對壓力感測、氣壓高度計、生理訊號監控及微創手術等。

結果 (英文) 1:

Target for the development of this project with high sensitivity osmotic effect of absolute pressure sensors use MEMS technology. Composition sensor mainly comprises two parts, one for the integration of a pressure-sensitive high aspect ratio sensing unit sensing the cilia, the other part is the osmotic effect nanoparticle film. Element, proposed innovation expected to have high sensitivity, high dynamic range and fast response time and other advantages.
With the use of sensors to achieve high aspect ratio will cilia arrays of magnetic magnetic fluid technology, this research team has also made a preliminary master the technology cilia arrays, and has just published the best seminar MEMS field MEMS 2020, this project will further optimization of the microstructure cilia arrays. Cilia arrays may amplify the pressure changes caused by the structural deformation, thus greatly increase the sensitivity of the pressure detecting sensor. Sealed reference pressure chamber of the sensor and its signal electrode film, the conventional manufacturing process of the MEMS. In order to have the best permeation effect cilia to substantially improve the sensitivity and resolution, the present technology development project will also be deposited on the conductive particles of the cilia, including nanoparticles and nano metal spraying techniques technology clusters, and on the generating a sensing effect of the conductive particles of two different methods were compared. Further, in addition to a simple assembly of the desired carbon nanotube particles themselves ultrasonic spray coating system of the present program, and will develop a customized innovative gas aggregation source system, to achieve a uniform sputtering of the nano particles film.
Thanks to the osmotic effect cilia microstructure and sensing unit of nano thin film, the present innovative element in addition to the proposed project with high sensitivity, wide pressure detecting range, the lower limit of detectable pressure, also has a fast response time and recoverability and ruggedness advantages, will meet the needs of applications in various fields, including wearable electronics, absolute pressure sensing, barometric altimeter, physiological signal monitoring and minimally invasive surgery.

結果 (英文) 2:

The goal of this program is to develop high-sensitivity absolute pressure sensors with permeable effect using micro-electromechanical technology. The composition of the sensor consists of two main parts, one is to integrate the pressure-sensitive high-depth-to-width ratio of the sensing unit, and the other is the osmosis effect nanoparticle film. The innovative components are expected to offer advantages such as high sensitivity, high dynamic range and fast response time.
The sensor adopts a magnetic fiber array with a high-depth-to-width ratio will be achieved by magnetic fluid technology, and the research team has also mastered the production technology of the cilia array, and has just published the best seminar MEMS 2020 in the field of micro-electromechanical, the plan will further optimize the microstructure of the cilia array. The cilia array amplifies the structural deformation caused by pressure changes, which greatly improves the sensitivity of the sensor to detect pressure. The sealing cavity of the reference pressure of the sensor and its signal electrode film will be made using the traditional micro-electromechanical process. In order to achieve optimal osmosis effect for the best permeability to significantly improve sensitivity and resolution, the plan also will develop techniques for depositing conductive particles on the cilia, including nanoparticle spraying technology and nano-metal cluster technology, and compare the sensing effects of conductive particles generated by two different methods. In addition, the program will, in addition to assembling a simple nanotube particle spray of the ultra-sound wave coating system, and will develop an innovative customized gas condensed source system to achieve sputtering even nanoparticle film.
Thanks to the microstructure and penetration effect nanofilms of the sensing unit, the innovative components proposed in this program, in addition to their high sensitivity, extensive pressure detection range, low pressure detection limits, but also with fast response times and recoverability and durability, will meet the needs of various applications, including wearable electronics , absolute pressure sensing, air pressure altimeter, physiological signal monitoring and minimally invasive surgery.

結果 (英文) 3:

The aim of this project is to develop a high sensitivity absolute pressure sensor with permeability effect by using MEMS technology. The sensor consists of two parts: one is the sensing unit integrating pressure sensitive high aspect ratio cilia, the other is the osmotic effect nanoparticle film. The proposed innovative element is expected to have the advantages of high sensitivity, high dynamic range and fast response time.
The high aspect ratio magnetic cilia array used in the sensor will be realized by the magnetic fluid technology. The research team has also preliminarily mastered the manufacturing technology of cilia array, and has just published in the best Symposium MEMS 2020 in the field of micromechanics. This project will further optimize the microstructure of cilia array. The ciliated array can amplify the structural deformation caused by pressure change, so it will greatly improve the sensitivity of the sensor to detect pressure. The sealed cavity of the sensor's reference pressure and its signal electrode film will be fabricated by the traditional MEMS process. In order to improve the sensitivity and resolution of the cilia, the project will also develop the deposition technology of conductive particles on the cilia, including nano particle spray technology and nano metal cluster technology, and compare the sensing effect with the conductive particles generated by two different methods. In addition, in this project, in addition to self-assembly of a simple ultrasonic coating system for carbon nanotube particle spraying, an innovative customized gas condensation source system will be developed to achieve uniform sputtering of nanoparticle films.
Due to the fiber structure and permeability effect of the sensing unit, the innovative elements proposed in this project not only have the advantages of high sensitivity, wide range of pressure detection, low pressure detection limit, but also have the advantages of fast response time, recoverability and durability, which will meet the needs of various applications, including wearable electronic devices, absolute pressure sensing Measurement, barometer, physiological signal monitoring and minimally invasive surgery.