AMP National Army has several problems,<br><br>1. Several of the previously tested slurry (DSM2410, 2141, 2143, 2145, 2146, 2147, 2148) polished with fastim problems after not being easily washed and washed in Al materials. But there is no problem with the SUS material.<br><br>Taniguchi-san, do you have good cleaning agent advice? Is the oil or acid for cleaning the liquid?<br><br>2. Can SiO2 be made into a compound slurry? If so, what's the reason?<br><br>3. In addition, in the attachment, please add additional information about DSM2148 abrasive Size (um), pH, S.G.
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