2.6.3 Local scrubber(1) Waste gas abatement (local scrubber) shall be furnished with dualadsorbers (with redundancy small adsorber)and volume indicator foralerting(2) Waste gas abatement(local scrubber)of NH3, HCL and SiH2CL2 shall befurnished with dual adsorbers(with redundancy large adsorber)and volumeindicator for alerting(3) Waste gas abatement shall be designed local scrubber with dry pumpnside(4) Contractor has responsibility to verify and confirm the grouping and designto meet the safety and quality requirement especially for NF3 BSGS(5 Contractor should to specify and guarantee scrubber life time by changefrequency or lifetime