1 Flow rate: 0 = 0.1 cfm (for 0.3µm

1 Flow rate: 0 = 0.1 cfm (for 0.3µm and 0.5µm sensitivity); 1 = 1.0 cfm (for 0.5µm sensitivity only)
2 Sensitivity: 3 = 0.3 µm minimum sensitivity; 5 = 0.5 µm minimum sensitivity
3 Exhaust location: D = Bottom (down) exhaust; S = Side exhaust
4 Flow measurement: F = with flow measurement; N = without flow measurement
5 Communication: E = Ethernet; S = Serial I/O Options2; A = Analog; W = Wireless3

結果 (中文) 1:

1 流量︰ 0 = 0.1 立方英尺/分 （为 0.3µm 和 0.5µm 灵敏度）;1 = 1.0 cfm (0.5µm 为灵敏度只)2 灵敏度︰ 3 = 0.3 µ m 最小灵敏度;5 = 0.5 µ m 最小灵敏度3 排气位置︰ D = 底部 （向下） 排气;S = 侧排气4 流量测量︰ F = 流量测量;N = 无流量测量5 通信︰ E = 以太网;S = 串行 I/O Options2;A = 模拟;W = Wireless3

結果 (中文) 2:

1流速：0 = 0.1立方英尺（0.3微米为0.5微米和灵敏度）; 1 = 1.0立方英尺（0.5微米的灵敏度只）
2灵敏度：3 = 0.3微米的最小灵敏度; 5 = 0.5微米最小灵敏度
3排位置：D =底部（下）排气; S =侧排气
4流量测量：F =流量测量; N =无流量测量
5通信：E =以太网; S =串行I / O选项2; A =模拟; W = Wireless3

結果 (中文) 3:

1流量：0 = 0.1立方英尺（0.3 m和0.5 mµµ灵敏度）；1 = 1立方英尺（0.5µ灵敏度只有）2灵敏度：3 = 0.3µm最小灵敏度；5 = 0.5µm最小灵敏度3排气位置：D =底部（向下）排气；S =侧排气4流量测量：F =流量测量；N =无流量测量5通信：E =以太网；S =串行I/O选项；= W = wireless3模拟；