在常溫下，為無色、無臭、不燃的易壓縮性氣體，揮發性較高，是最穩定的有機

在常溫下，為無色、無臭、不燃的易壓縮性氣體，揮發性較高，是最穩定的有機化合物之一，不易溶于水。一般為惰性低毒物質，在高濃度下是窒息劑。應用在半導體CVD/Etching/去光阻/Clean、Solar cell產業

結果 (英文) 1:

At room temperature, a colorless, odorless, nonflammable gas is easily compressed, high volatility, organic compound is one of the most stable, readily soluble in water. Toxicity generally inert substance, at high concentrations is asphyxiant. Used in the semiconductor CVD / Etching / Stripping / Clean, Solar cell industry

結果 (英文) 2:

At room temperature, for colorless, odorless, non-combustible compressible gas, high volatility, is one of the most stable organic compounds, not easy to dissolve in water. Generally an inert low-toxic substance, at high concentrations is a suffocatant agent. Applications in semiconductor CVD/Etching/de-optical resistance/Clean, Solar cell industry

結果 (英文) 3:

At room temperature, it is a colorless, odorless, nonflammable and compressible gas with high volatility. It is one of the most stable organic compounds and insoluble in water. Generally, it is inert and low toxic substance, and asphyxiant at high concentration. Application in CVD / etching / photoresist removal / clean and solar cell industries