散射场层析广义椭偏仪基于传统椭偏仪的光学散射仪而开发研制，是一种新型光

散射场层析广义椭偏仪基于传统椭偏仪的光学散射仪而开发研制，是一种新型光学仪器，其测量方法基于光学远场测量技术。在纳米加工制造过程中，达到对关键重要特征进行非接触、无破坏、低成本、高效、表面形貌测量。
透射式散射场层析广义椭偏仪则在原本反射式椭偏仪的基础上进一步开发，以透射式方式实现对生物样品等特殊材料的表面形貌测量。
本文简要说明散射场层析广义椭偏仪的测量原理，已经透射式椭偏仪光路的结构设计、定位安装和受力分析等相关工作。结构建模采用SolidWorks 2015系列软件完成，受力分析采用ansys15.0，根据实际测量零部件质量和真实工作受力进行模拟。

結果 (英文) 1:

Generalized ellipsometry scattering tomography based on the traditional optical instrument developed Ellipsometer, is a new kind of optical instrument, its far-field measurement methods based on optical measurement technology. Nano-manufacturing process, achieve the crucial characteristics of non-contact, no damage, low cost, high efficiency, measurement of surface topography.Transmissive scatter tomography generalized ellipsometry in reflection type Ellipsometer based on further development of transmission-mode surface topography measurement of biological samples and other special materials.This brief description of scattering tomography measurement of generalized ellipsometry theory have transmission ellipsometry of optical structure design, location and analysis and other related work. Structural modeling using SolidWorks 2015 series software, force analysis by ansys15.0, based on actual measurement quality and simulate real work force.

結果 (英文) 3:

The scattering field tomography based on the optical scattering instrument based on the traditional ellipsometry is a new type of optical instrument. In the process of nano manufacturing, non contact, non destruction, low cost, high efficiency and surface topography measurement are achieved.On the basis of the original reflection ellipsometry, the generalized ellipsometry is further developed to realize the surface topography measurement of special materials such as biological samples.This paper briefly describes the principle of the measurement of the scattering field tomography, the structure design, the positioning and installation of the optical path and the stress analysis and other related work. Structural modeling using SolidWorks 2015 series software is completed, the stress analysis using ansys15.0, according to the actual measurement of the quality of parts and the actual work force to simulate.