此檢測系統由平面波光源模組、橫向剪切干涉光路、感光耦合元件和波前相位解

此檢測系統由平面波光源模組、橫向剪切干涉光路、感光耦合元件和波前相位解調模組所組成，其具備著剪切干涉技術所特有的共光程之特性，使系統難以受到環境所干擾，具備極高的穩定性。以剪切干涉技術為基礎，為了使系統具備高數值孔徑透鏡及非球面透鏡的量測能力，本研究開發了非單焦點多區域檢測技術，藉由自行設計的轉折稜鏡組，令系統能夠在維持波前平整的狀況下改變光源入射角度，使CCD能夠順利接收到因待測透鏡曲率過大而發散或沒有聚焦的光束。此外本透鏡檢測系統中，光柵元件最為昂貴且製造難度高，其苛刻的規格是受制於四波剪切干涉技術所使用的傅立葉解相演算法。因此本計畫提出了疊紋解相演算法，其能夠使用較低密度之光柵元件而得到相同的解相準確度，故能夠大幅地降低系統成本。

結果 (英文) 1:

This detection system consists of a plane wave light source module lateral shearing interferometer light path, and a charge-coupled device wavefront phase demodulation modules is composed, comprising the shearing interferometry characteristics peculiar to the common optical path to make the system less susceptible to the environment the disturbance, with a high stability. Shear interferometry-based technology, in order to make the system have the ability to measure high numerical aperture lens and aspheric lens, the focus of research and development of non-single multi-zone detection techniques, by turning Prism group designed, so that the system can changing the incident angle at the light source position remains flat wave front, so that the CCD can be smoothly received due to beam curvature of the lens is too large to be measured or unfocused divergent. In addition, this lens detection system, the grating element with high difficulty of making the most expensive, which is subject to stringent specifications four-wave shearing interferometry is used Fourier phase unwrapping algorithm. This project therefore proposed algorithm Moire phase solution, which can be obtained with the same accuracy solution of lower density grating element, it is possible to greatly reduce the system cost.

結果 (英文) 2:

This detection system is composed of flat wave light source module, transverse shear interference light path, photosensitive coupling component and wave-front phase demodulation module, which has the characteristics of common light range characteristics characteristics of shear interference technology, making the system difficult to be disturbed by the environment and has high stability. Based on shear interference technology, in order to make the system have the measuring ability of high numerical aperture lens and aspherical lens, this research and development has developed a non-single-focus multi-area detection technology, which enables the system to change the incident angle of the light source under the condition of maintaining the levelof of the wave. The CCD is able to successfully receive beams that diverge or are not focused due to excessive curvature of the lens under test. In addition, the grate component spree component is the most expensive and difficult to manufacture in this lens detection system, and its harsh specifications are subject to the Four Wave Shear Interference Technology using the Four-Wave Shear Interference Algorithm. Therefore, the plan proposes a overlapping dephase algorithm, which can use the lower density light gate components to obtain the same dephase accuracy, so that the system cost can be significantly reduced.

結果 (英文) 3:

This detection system is composed of plane wave light source module, transverse shearing interference optical path, photosensitive coupling element and wavefront phase demodulation module. It has the characteristic of common optical path of shearing interference technology, which makes the system difficult to be interfered by the environment and has high stability. Based on the shearing interference technology, in order to make the system have the measurement ability of high numerical aperture lens and aspherical lens, the non single focus multi area detection technology is developed in this study. With the self-designed turning prism group, the system can change the incident angle of the light source under the condition of keeping the wavefront flat, so that the CCD can smoothly receive the divergence or no divergence due to the large curvature of the lens to be measured There is a focused beam of light. In addition, the grating element is the most expensive and difficult to manufacture in the lens detection system. Its strict specification is subject to the Fourier solution algorithm used by the four wave shearing interference technology. Therefore, this project proposes a moire phase unwrapping algorithm, which can obtain the same phase unwrapping accuracy by using low density grating elements, so it can greatly reduce the system cost.