本計畫目標為利用微機電技術開發高靈敏度與高解析度之微纖毛壓力感測器。本

本計畫目標為利用微機電技術開發高靈敏度與高解析度之微纖毛壓力感測器。本計畫所提出之絕對壓力感測陣列主要包含兩大部分。其一為壓力敏感之滲透效應磁性纖毛薄膜研製，另一為密封腔體與指叉電極製作。磁性纖毛薄膜為壓力感測單元的重要結構，上方所沉積之導電粒子更是本研究計畫重點之一，將大幅影響感測器特性。密封腔體則作為絕對壓力感測之參考壓力，可用以推得壓力變化。滲透效應磁性纖毛薄膜由高深寬比之磁性微纖毛陣列與沉積於其上方之導電粒子結合而成。磁性纖毛生長技術本研究團隊已有所掌握，最新成果已發表於微機電領域最佳研討會MEMS 2020。此計畫將基於目前研究成果更進一步優化纖毛陣列之微結構。而為了使纖毛上所沉積之導電粒子達最佳的滲透效應結果，本計畫也將開發氣體凝聚源系統。並對奈米碳管與金屬團簇兩種不同類型導電粒子進行比較。密封腔體則由高分子聚合物薄膜與玻璃空腔密封接合而成，是為了絕對壓力感測所設計之參考壓力腔體。指叉電極由傳統微機電製程製作。相較於平行電極，指叉電極正負極可均勻接觸滲透效應磁性纖毛薄膜，因此具有更為靈敏的感測表現。本計畫最終目標為開發擁有高靈敏度與高解析度的壓力感測陣列。得力於感測單元之纖毛微結構，與目前現有的壓力感測陣列相比，本計畫所提出之創新元件設計除了具有極高的靈敏度、廣泛的壓力檢測範圍、較低的壓力可檢測極限。也擁有響應時間快速和可恢復性及耐用性佳等優勢。將滿足各領域應用的需求，包括穿戴式電子裝置、絕對壓力感測、氣壓高度計、生理訊號監控及微創手術等。

結果 (英文) 1:

This program is a target using MEMS technology to develop high sensitivity and high resolution of the micro pressure sensor cilia.
Absolute pressure sensing array proposed by this project consists mainly of two parts.
One of the pressure sensitive cilia osmotic effect of the magnetic film developed, and the other is a sealed cavity interdigitated electrode fabrication.
The magnetic thin film is a pressure sensing cilia important structural element, the conductive particles are deposited over the project is one of the focus of the present study, will significantly affect the sensor characteristics.
Seal the reference pressure chamber is measured as the absolute sense, may be used to push pressure changes.
Osmotic effect of the magnetic film of a magnetic micro-cilia cilia arrays wider than the conductive particles deposited thereon and advanced over the bonded.
Magnetic cilia growth technology team has mastered this study, the latest results have been published in the field of micro-electromechanical best seminar MEMS 2020.
This plan will be based on the research results to further optimize the microstructure of cilia arrays.
In order conductive particles deposited on the osmotic effect of the cilia of the best results, this project also developed a gas source coagulation system.
Carbon nanotube and the metal clusters and two different types of conductive particles are compared.
Sealing the cavity by a polymer film bonded together with the glass sealing of cavities, to the reference pressure is an absolute pressure sensing chamber of the design.
Interdigital electrode made of a conventional MEMS process.
Compared to the parallel electrodes, the positive and negative electrodes may be interdigitated osmotic effect uniform contact with the magnetic film of cilia, thus having a more sensitive sensing performance.
This ultimate goal for the development project with high sensitivity and high resolution of pressure sensing array.
Thanks to the cilia of the microstructure of the sensing unit, as compared with currently available pressure-sensing array device of the present innovation proposed by the project design in addition to having a very high sensitivity, wide pressure detecting range, the lower limit of detectable pressure .
Also has a fast response time and recoverability and ruggedness advantages.
Will meet the needs of applications in various fields, including wearable electronic device, an absolute pressure sensing barometric altimeter, physiological signal monitoring and minimally invasive surgery.

結果 (英文) 2:

本计划目标为利用微机电技术开发高灵敏度与高分辨率之微纤毛压力传感器。
The absolute pressure sensing array proposed in this plan consists of two main parts.
One is the development of the pressure-sensitive permeation effect magnetic cilia film, and the other is made of sealed cavity and finger fork electrode.
Magnetic cilia film is an important structure of the pressure sensing unit, and the conductive particles deposited above are one of the key points of this research program, which will greatly affect the sensor characteristics.
The sealed cavity is used as a reference pressure for absolute pressure sensing and can be used to push down pressure changes.
渗透效应磁性纤毛薄膜由高深宽比之磁性微纤毛数组与沉积于其上方之导电粒子结合而成。
Magnetic cilia growth technology This research team has been mastered, the latest results have been published in the field of micro-electromechanical the best workshop MEMS 2020.
This program will further optimize the microstructure of the cilia array based on current research results.
In order to achieve the best osmosis effect results for the conductive particles deposited on the cilia, the program will also develop a gas condensation source system.
The two different types of conductive particles, nanocarbon tube and metal cluster, were compared.
The sealed cavity is made of polymer film and glass cavity seal ingested and is designed for absolute pressure sense.
The finger fork electrode is made from traditional micro-electromechanical processes.
Compared with parallel electrodes, the positive and negative electrodes of the fork electrode can be evenly exposed to the permeable magnetic cilia film, so it has a more sensitive sensing performance.
The ultimate goal of this program is to develop an array of pressure sensing with high sensitivity and high resolution.
The innovative component design proposed in this plan is designed to detect limits in addition to extremely high sensitivity, extensive pressure detection range, and low pressure, compared with the existing pressure sensing array.
It also offers the advantages of fast response times, recoverability and durability.
It will meet the needs of various applications, including wearable electronics, absolute pressure sensing, air pressure altimeter, physiological signal monitoring and minimally invasive surgery.

結果 (英文) 3:

The aim of this project is to develop a high sensitivity and high resolution micro ciliary pressure sensor using MEMS technology.
The absolute pressure sensing array proposed in this project consists of two parts.
One is the preparation of pressure sensitive permeability effect magnetic cilium film, the other is the fabrication of sealed cavity and finger fork electrode.
The magnetic ciliated film is an important structure of pressure sensing unit, and the conductive particles deposited on it are one of the key points of this research project, which will greatly affect the characteristics of the sensor.
The seal chamber is used as the reference pressure for absolute pressure sensing, which can be used to push the pressure change.
The permeability effect magnetic cilium film is composed of a high aspect ratio magnetic micro cilium array and conductive particles deposited on it.
The research team has mastered the magnetic cilium growth technology, and the latest achievements have been published in the best Symposium MEMS 2020 in the field of micro electromechanical.
This project will further optimize the microstructure of the ciliated array based on the current research results.
In order to achieve the best penetration effect of the conductive particles deposited on the cilia, the gas condensation source system will also be developed.
Two different types of conducting particles, carbon nanotubes and metal clusters, were compared.
The sealed cavity is made of polymer film and glass cavity. It is a reference pressure cavity designed for absolute pressure sensing.
Finger fork electrode is made by traditional MEMS process.
Compared with the parallel electrode, the positive and negative electrodes of the finger fork electrode can contact the permeability effect magnetic cilium film uniformly, so it has a more sensitive sensing performance.
The ultimate goal of this project is to develop a pressure sensing array with high sensitivity and resolution.
Compared with the current pressure sensing array, the innovative element design proposed in this project has a high sensitivity, a wide range of pressure detection, and a lower pressure detectability limit.
It also has the advantages of fast response time, recoverability and durability.
It will meet the needs of various applications, including wearable electronic devices, absolute pressure sensing, barometer, physiological signal monitoring and minimally invasive surgery.