The cross-section schematic of the

The cross-section schematic of the coater is shown in Fig. 1. 32 glass tubes may be accommodated in the vacuum chamber. Borosilicate glass tubes of outside diameter 37 mm and length 1.2 m have been used in our coating experiments. During the coating the glass tubes execute planetary rotation driven by a controlled variable speed dc motor outside the chamber. Typically the tubes are driven around the chamber center at 4 rpm and spun on their axes at around seven times this rate. The SS–AlN cermet material has been investigated as a solar absorbing layer using this coater. The coater contains three cylindrical targets, 1.5 m long and 68 mm in diameter, consisting of aluminium (98purity), stainless steel and copper (99purity) tubes. They are separated by a screen to prevent cross-contamination. Each cylindrical target has a magnetron configuration of six longitudinal plasma columns on the target
surface generated by a permanent magnet unit inside the cathode. The permanent magnet unit, consisting of six longitudinal magnet columns, is assembled from Nd–Fe–B permanent magnet pieces. The maximum field is approximately 0.04 T on the target surface. During sputtering the permanent magnet unit is rotated, driven by a controlled variable speed dc motor outside the chamber, while the target material is static. The six longitudinal plasma columns follow the rotating magnetic field which ensures uniform sputter erosion of target materials both around the circumference and along the length of the target. The typical rotation speed of the magnet unit is 3 rpm.

結果 (中文) 1:

涂布机的截面示意图如图 1 所示。在真空室中，可能容纳 32 的玻璃管。高硼硅玻璃管的外径，37 毫米、 长度 1.2 米被用于我们涂料实验。在涂层玻璃管执行行星旋转在会议厅外的控制的变频调速直流电机驱动的。通常这些电子管是 4 rpm 驱动中的左右室中心，它们以七倍左右这种速度的轴上旋转。作为使用此涂布机太阳能的吸收层，研究了 SS — — 氮化铝金属陶瓷硬质材料。涂布机包含三个圆柱靶、 1.5 米长，直径 68 毫米铝 （98purity）、 不锈钢和铜合金 （99purity） 管组成。他们被隔开一个屏幕，防止交叉污染。每个圆柱的目标在目标系统上已六纵等离子体柱磁控配置永久磁铁单元内阴极产生的表面。永久磁铁单元，组成的六纵磁柱，是由 — — — — 钕铁硼永磁体件组装而成的。最大的领域是大约 0.04 T 目标图面上的。溅射永久磁铁在单位被旋转，控制的变频调速直流电机驱动，在会议厅外而靶材料是静态的。六纵等离子体柱遵循旋转磁场，保证均匀材料喷溅侵蚀的靶材料沿圆周方向和沿长度的目标。磁铁单位典型的旋转速度 3 rpm。

結果 (中文) 3:

截面的涂布机的原理图如图1所示。32的玻璃管可以容纳在真空室。硼硅玻璃管的外径为37毫米，长度1.2米，已用于我们的涂层试验。涂层的玻璃管执行行星旋转通过控制直流电机调速驱动时的外室。通常情况下，管驱动在室中心在4转旋转轴在七次率。SS–陶瓷材料已被研究作为一个太阳能吸收层使用该涂布机。涂布机，包含三个圆柱靶，直径1.5米长和68毫米，由铝（98纯度），不锈钢和铜（99纯度）管。他们被一个屏幕，防止交叉污染。每个圆柱靶磁控配置六纵向等离子体柱对目标
表面阴极内部永久磁铁单元生成。永久磁铁单元，由六纵磁柱，Nd Fe B是从––永磁块组装。最大的领域是约0。04 T靶面上。在溅射过程中永磁体单元旋转，通过控制直流电机调速外箱的驱动，而目标材料是静态的。六纵向等离子体柱跟随旋转磁场，确保均匀的溅射侵蚀靶材料的圆周周围和沿靶的长度。磁体单元的典型的旋转速度为3 rpm。