当温度改变时，双臂同时受温度的影响，导致两路光发生相移，造成干涉条纹的

当温度改变时，双臂同时受温度的影响，导致两路光发生相移，造成干涉条纹的波谷波长的漂移，从而为温度传感测量的研究提供了参考。文中先通过数值仿真，模拟了不同臂长差集成MZI波导的干涉条纹随温度变化而产生的漂移的情况。而后通过标准的PLC工序，刻蚀了两个臂长差的集成MZI波导进行实验，验证所提测量方案的可行性。实验数据显示，其温度传感器其灵敏度为0.0102nm/℃,很好地相符仿真结果，同时与光纤布拉格光栅的温度灵敏度接近。

結果 (英文) 1:

When the temperature changes, both arms at the same time the effects of temperature, two-channel optical phase shift occurs, resulting in interference fringes in the trough of drift, which provides a reference for studies on the temperature measurement. This paper by means of numerical simulation to simulate different arm lengths difference integrated MZI wavelength changes with temperature drift of interference fringes. Standard PLC and processes, etching of two poor arm integrated MZI waveguide experiments to verify the feasibility of the survey plan. Experimental data show that the temperature sensor with a sensitivity of 0.0102nm/℃, a good consistent results, while close to the temperature sensitivity of Fiber Bragg grating.

結果 (英文) 2:

When the temperature changes, while the arms affected by temperature, resulting in two-way optical phase-shifted, causing the interference fringes trough wavelength drift, thereby providing a reference for the study of temperature sensor measurement. This paper first numerical simulation to simulate the situation is different drift integrated MZI waveguide arm length difference of interference fringes generated varies with temperature. Then step through a standard PLC, the arm length difference between two etched integrated MZI waveguide experiment to test the feasibility of the proposed measurement scheme. Experimental data show that the temperature sensor sensitivity of 0.0102nm / ℃, good consistent simulation results, while close to the temperature sensitivity of fiber Bragg grating.

結果 (英文) 3:

When the temperature changes, arms at the same time by the temperature effect, resulting in two optical phase shift, resulting in interference fringe trough the wavelength drift, so as to provide the reference of the study of temperature measurement. In this paper, a numerical simulation is made to simulate the drift of the interference fringes of the integrated MZI waveguide with different arm length difference. Then through the standard PLC process, etching the two arm length difference of the integrated MZI waveguide experiment, verify the feasibility of the proposed measurement scheme. The experimental data show that the temperature sensor has a sensitivity of 0.0102nm/, which is well consistent with the simulation results. At the same time, it is close to the temperature sensitivity of the fiber Prague grating.