investigations can be completed in the same area of the same sample [17]. MICHAEL and GIANNUZZI [17] reported a series of image pairs of Si obtained with an electron beam at 20, 10 and 5 kV at the same area finally milled with 30 kV Ga+, 5 kV Ga+ and 2 kV Ga+ (Fig. 5). The results show that the improvement in the indexing rate and pattern quality by low voltage ion milling is obvious at all SEM operating voltages. This work suggests that ion milling should be done at a low voltage and low current in order to obtain nice EBSD patterns. An example of nice orientation map of GW 103 Mg alloy polished by Hitachi IM-3000 is shown in Fig. 6. The image quality seems a little better than that of Mg alloys with successful electropolishing as shown in Fig. 3. The polishing parameters of voltage, gas flow and polishing time are 3 kV, 0.08 cm3/min and 30 min, respectively. It is recommended to tilt the sample 80° and to rotate 360° during polishing. Preparing multiple samples at the same time is also possible when setting an eccentricity of rotation