In general, the minimum grain/subgrain size that can be investigated is dependent on the spatial resolution of the equipment. For a FESEM, the spatial resolution of EBSD tends to get worse slightly as the probe current increases from 10 nA to 100 nA [4,18]. The chosen step size should not be smaller than the spatial resolution. Therefore, a real minimum grain/subgrain size that can be investigated for each EBSD scan is based on the chosen step size. At least 5 pixels per grain/subgrain are required to obtain an accuracy of 10% and a minimum of ~8 pixels per grain/subgrain are required to have an accuracy of 5% [18].