For deposition of the SS–AlN cermet

For deposition of the SS–AlN cermet selective surfaces, the vacuum chamber was pumped to a base pressure of 6–8×10−3 Pa, taking about 10 min. An SS–AlN cermet adhesion layer was first deposited on the glass substrate using the method described above. After this adhesion layer was deposited, the chamber vacuum improved to around 1.5–1.8×10−3 Pa. Afterwards, an Al infrared reflector layer was deposited in pure argon gas at a pressure of 0.1 Pa. Then a high metal volume fraction SS–AlN cermet layer and a low metal volume fraction SS–AlN cermet layer were deposited in succession using the method as described above. Finally, an AlN anti-reflection layer was deposited on the low metal volume fraction cermet layer by dc reactive sputtering. It takes around 35–40 min to complete the deposition of the solar selective coatings onto each batch of tubes. The cycle time to coat 32 tubes is 60–70 min.

結果 (中文) 1:

SS — — 氮化铝金属陶瓷选择性表面沉积，真空室抽到基地的压力为 6 — — 8 × 10 − 3 Pa，以约 10 分钟。SS — — 氮化铝金属陶瓷粘合层第一次使用上面描述的方法在玻璃基板上沉积。这粘合层沉积后，室真空度提高到大约 1.5 — — 1.8 × 10 − 3 宾夕法尼亚州之后，红外反射器层沉积在纯氩气在压力为 0.1 基地宾夕法尼亚州然后使用方法，如上文所述的连续沉积了高金属体积分数 SS — — 氮化铝金属陶瓷层和低金属体积分数 SS — — 氮化铝金属陶瓷层。最后，氮化铝的抗反射层直流反应溅射沉积低金属体积分数金属陶瓷层上。它需要大约 35-40 分钟完成太阳能选择性涂层在每个批的管子上的沉积。大衣 32 管的周期时间是 60-70 分钟。

結果 (中文) 3:

对SS–AlN陶瓷表面的选择性沉积，真空室抽到6–8×10−3帕底压，以约10分钟。SS–AlN陶瓷粘附层首先沉积在使用上述方法的玻璃基板。后粘附层沉积，室真空度提高到约1.5–1.8×10−3宾夕法尼亚州之后，一种铝红外反射层沉积在纯氩气在0.1帕的压力再高的金属体积分数的SS–陶瓷层和低金属体积分数的SS–陶瓷层沉积在使用上述方法的继承。最后，AlN减反射层由直流反应溅射在低金属体积分数的金属陶瓷层沉积。它需要大约35–40分钟完成的太阳能选择性涂层沉积到每批管。周期时间是60–外套32管70分钟