感測器的組成包含一整合壓力敏感高深寬比纖毛之感測單元，及一滲透效應奈米

感測器的組成包含一整合壓力敏感高深寬比纖毛之感測單元，及一滲透效應奈米粒子薄膜。提出之創新的元件預計具有高靈敏度、高動態範圍與快速響應時間等優勢。感測器採用之具高深寬比磁性纖毛陣列將以磁流體技術實現。本研究團隊亦初步掌握纖毛陣列之製作技術，並剛發表於微機電領域最佳研討會MEMS 2020。本計畫將更進一步優化纖毛陣列之微結構。纖毛陣列可放大壓力變化所造成的結構形變。因此將大幅提高感測器偵測壓力之靈敏度。感測器的參考壓力之密封腔體與其訊號電極薄膜，將採用傳統之微機電製程製作。為了使纖毛具備最佳的滲透效應以大幅提高靈敏度與解析度。本計畫亦將開發在纖毛上沉積導電粒子之技術，包括奈米粒子噴塗技術與奈米金屬團簇技術。並將對與兩種不同方法生成之導電粒子的感測效應進行比較。此外，為實現濺射均勻之奈米顆粒薄膜。本計畫除了將自行組裝一簡易之奈米碳管粒子噴塗所需之超音波塗佈系統，並將開發一創新客製化的氣體凝聚源系統。得力於感測單元之纖毛微結構與滲透效應奈米薄膜。本計畫所提出之創新元件除了具有極高的靈敏度、廣泛的壓力檢測範圍、較低的壓力可檢測極限。也擁有響應時間快速和可恢復性及耐用性佳等優勢。將滿足各領域應用的需求，包括穿戴式電子裝置、絕對壓力感測、氣壓高度計、生理訊號監控及微創手術等。

結果 (英文) 1:

The composition comprises an integrated pressure sensor sensitive high aspect ratio sensing unit sensing the cilia and an osmotic effect nanoparticle film.
Element, proposed innovation expected to have high sensitivity, high dynamic range and fast response time and other advantages.
The use of sensors with a high aspect ratio will be magnetic cilia arrays magnetically fluid technology.
This preliminary study team also mastered production technology cilia arrays, and has just published the best seminar MEMS field MEMS 2020.
This project will further optimize the microstructure cilia arrays.
Cilia arrays may amplify the pressure changes caused by the structural deformation.
Thus will significantly increase the sensitivity of the sensor to detect pressure.
Sealed reference pressure chamber of the sensor and its signal electrode film, the conventional manufacturing process of the MEMS.
In order to have the best permeation effect cilia to substantially increase the sensitivity and resolution.
This technology development project will also be deposited on the conductive particles of the cilia, including nanoparticles and nano metallic clusters spraying techniques technology.
Sensing and comparing the effect of two different methods to generate the conductive particles.
Further, to achieve uniformity of the sputtered film nano particles.
In addition to this project a simple assembly of carbon nanotube particles themselves required for spraying the coating system of ultrasound and innovative development of a custom aggregation gas source system.
Thanks to the osmotic effect of the microstructure cilia nm film of the sensing unit.
The innovative element of the present program, proposed in addition to having a high sensitivity, wide pressure detecting range, the lower limit of detectable pressure.
Also has a fast response time and recoverability and ruggedness advantages.
Will meet the needs of applications in various fields, including wearable electronic device, an absolute pressure sensing barometric altimeter, physiological signal monitoring and minimally invasive surgery.

結果 (英文) 2:

The composition of the sensor consists of a sensing unit that integrates the pressure-sensitive high-depth-to-width ratio of the cilia, and a permeable nanoparticle film.
The innovative components are expected to offer advantages such as high sensitivity, high dynamic range and fast response time.
The magnetic cilia array used by the sensor will be implemented using magnetic fluid technology.
The research team also had a preliminary understanding of the production techniques of the cilia array and just published meME200 in the field of micro-electromechanical.
This plan will further optimize the microstructure of the cilia array.
The cilia array amplifies the structural deformation caused by pressure changes.
Therefore, the sensitivity of the sensor to detect pressure will be greatly improved.
The sealing cavity of the reference pressure of the sensor and its signal electrode film will be made using the traditional micro-electromechanical process.
In order to achieve the best penetration effect of the cilia to greatly improve sensitivity and resolution.
The program will also develop technologies for the deposit of conductive particles on cilia, including nanoparticle spraying technology and nano-metal cluster technology.
The sensing effect of conductive particles generated by two different methods is also compared.
In addition, in order to achieve sputtering even nanoparticle film.
In addition to assembling a simple Nano tube particle spray-on supersonic coating system, the program will develop an innovative, customized gas condensed source system.
It is powered by the microstructure of the sensing unit and the penetration effect of the nanofilm.
In addition to the high sensitivity, extensive pressure detection range and low pressure detection limits, the innovative components proposed in this program are highly sensitive.
It also offers the advantages of fast response times, recoverability and durability.
It will meet the needs of various applications, including wearable electronics, absolute pressure sensing, air pressure altimeter, physiological signal monitoring and minimally invasive surgery.

結果 (英文) 3:

The sensor consists of a sensing unit integrating pressure sensitive high aspect ratio cilia and a nanoparticle film with osmotic effect.
The proposed innovative element is expected to have the advantages of high sensitivity, high dynamic range and fast response time.
The magnetic cilia array with high aspect ratio will be realized by magnetic fluid technology.
Our research team has also preliminarily mastered the fabrication technology of ciliated array, and has just published in MEMS 2020, the best Symposium in the field of MEMS.
This project will further optimize the microstructure of the ciliated array.
The cilia array can magnify the structural deformation caused by the pressure change.
Therefore, the sensitivity of the sensor to detect pressure will be greatly improved.
The sealed cavity of the sensor's reference pressure and its signal electrode film will be fabricated by the traditional MEMS process.
In order to make the cilia have the best penetration effect to greatly improve the sensitivity and resolution.
The project will also develop technologies for deposition of conductive particles on cilia, including nanoparticle spray technology and nanometal cluster technology.
The sensing effects of the conductive particles generated by the two different methods are compared.
In addition, in order to achieve uniform sputtering of nanoparticle films.
In addition to self-assembly of a simple ultrasonic coating system for carbon nanotube particle spraying, the project will develop an innovative customized gas condensation source system.
The capillary microstructure and permeability effect of the sensing unit are the main factors.
In addition to its high sensitivity, wide range of pressure detection and low pressure detectability limit, the innovative element proposed in this project has the following advantages.
It also has the advantages of fast response time, recoverability and durability.
It will meet the needs of various applications, including wearable electronic devices, absolute pressure sensing, barometer, physiological signal monitoring and minimally invasive surgery.