所謂的共面偵測是透過雙折射晶體(WP或BD)、平面鏡、稜鏡與光柵等元件

所謂的共面偵測是透過雙折射晶體(WP或BD)、平面鏡、稜鏡與光柵等元件的光路設計與配置，使通過上述元件且行進方向相互平行的光束正向入射待測光柵後形成Littrow 架構的繞射光路，各相對應的零階及正負一階繞射光束因Littrow 架構而沿原路徑行進並再次通過原光路後相互疊合形成干涉條紋，再由相對應的光偵測器所接收，因各繞射階行經相同的路徑及光學元件，形成所謂的共路徑式光路架構，可有效提升系統的穩定性。當光柵沿著面外或面內位移時，藉由干涉訊號的加減運算即可回推光柵的面內或面外位移變化量，而透過比較相同偵測面上不同組偵測架構所量得的面內及面外位移量，我們即可回推待測光柵的旋轉角度變化量。此外，為了提高系統量測解析度、靈敏度及穩定度，我們自行開發了一套WP弦波外差調制技術，藉由控制WP元件進行高頻的弦波運動，使穿過該元件的雷射光束形成外差光源，而後將其與干涉儀光路相結合，除可有效提升干涉儀系統的靈敏度之外，亦能有效降低環境低頻震動對量測結果所造成的影響，使系統具備高穩定度。

結果 (英文) 1:

The so-called coplanar detection is through a birefringent crystal (WP or the BD), the optical path of the flat mirror design and configuration, Prism and grating element, so that the above-described elements to each other and parallel to the traveling direction of the forward light beam is incident after grating formation test Littrow architecture diffracted light path, each corresponding to a zero-order and negative first order diffracted beams due to the Littrow architecture along the original path and travels again through the original optical path overlap each other to form an interference fringe, and then by the corresponding light detector received, by each of the diffraction order traveled the same path and the optical element, a so-called co-path optical-path architecture, which can effectively improve the stability of the system. When the displacement of the grating or along the outer surface of the inner surface, the interference signals by addition and subtraction to push back the inner surface of the grating or the amount of change in displacement of the outer surface, while the same amount of Comparative detected through various detection surface architecture group to give the inner surface and the outer surface of the displacement amount, we can push back the rotation angle change amount in the test grating. In order to improve the measurement system resolution, sensitivity and stability, we developed a set of heterodyne WP sinusoidal modulation, by controlling the high frequency element WP sinusoidal movement, so that through the laser element heterodyne light beam is formed, after which the interferometer and the optical path combining, in addition to effectively enhance the sensitivity of the interferometer system outside, are also effective in reducing the environmental impact of low-frequency vibration caused by the measurement results, the system includes a high stability .

結果 (英文) 2:

The so-called cosysurface detection is the design and configuration of the optical path through components such as dual refractive crystals (WP or BD), plane mirrors, prisms, and grating, so that the beam sending through the above components and the direction of travel is directed into the light grate to form the littrow architecture of the bypass. Each corresponding zero-order and positive-negative first-order circumpwire beam travels along the original path due to the Littrow architecture and again forms an interference stripe after the original light path is combined with each other, and then received by the corresponding light detector, because each orbiting step passes through the same path and optical components, forming the so-called common path optical path architecture, which can effectively enhance the stability of the system. When the grating is shifted along or inside the surface, the amount of intra-face or extra-face displacement of the grating can be pushed back by the addition and subtraction of the interference signal, and by comparing the intra-face and extra-face displacement slots measured by different groups of detection structures on the same detection surface, we can push back the amount of rotation already shifted in the metered grate. In addition, in order to improve the resolution, sensitivity and stability of the system, we have developed a set of WP string wave exoplanet modulation technology, by controlling the WP component for high-frequency string wave motion, so that the laser beam passing through the component forms an external differential light source, and then combines it with the interferometer light path, in addition to effectively enhance the sensitivity of the interferometer system It can also effectively reduce the impact of low-frequency vibration on the measurement results of the environment, so that the system has a high degree of stability.

結果 (英文) 3:

The so-called coplanar detection is to design and configure the optical path of birefringent crystal (WP or BD), plane mirror, prism and grating, so that the beams passing through the above elements and parallel to each other in the direction of travel enter the grating to be measured and form the diffraction optical path of Littrow structure. The corresponding zero order and positive and negative first order diffraction beams move along the original path due to Littrow structure and pass through the original light again The interference fringes are overlapped to form interference fringes, and then received by the corresponding photodetectors. Because each diffraction step passes through the same path and optical elements, the so-called common path optical path architecture is formed, which can effectively improve the stability of the system. When the grating moves along the in-plane or out of plane, the in-plane or out of plane displacement of the grating can be pushed back by the addition and subtraction of the interference signal. By comparing the in-plane and out of plane displacement measured by different groups of detection structures on the same detection plane, we can push back the rotation angle change of the grating to be measured. In addition, in order to improve the resolution, sensitivity and stability of the system, we have developed a set of WP sine wave heterodyne modulation technology. By controlling the high frequency sine wave motion of the WP element, the laser beam passing through the element can form heterodyne light source, and then combine it with the optical path of the interferometer, which can not only effectively improve the sensitivity of the interferometer system, but also effectively reduce the environment The influence of low frequency vibration on the measurement results makes the system have high stability.