But since it cannot look that the notable effect due to difference of the means for closing including the temperature controller and vacuum means is the temperature setting part of the cited invention 2, and the difficulty of the configuration for the structure in which the base plate and chamber interval are shut tightly and accomplishment of the object or the configuration it can draw from the shape is produced it easily can inventThe configuration and characteristic of claim 8-11 the temperature setting part of the cited invention 2, and the base plate inspection cavity easily can draw from sealing or the hinge section which it configures in order to be cancelled.상기 온도설정부(220)는 상기 몸체부(210)의 일단 예컨대, 하단부에 설치되어 메모리모듈(1)에 검사하고자 하는 저온 또는 고온 즉, -15°C ~ 120°C범위로 신속하게 변환되도록 하는 수단이다.