Processing range: 400X400mm plane maximum processing speed: 6 m / s Z-axis maximum processing speed: 4 m / s minimum line width: 150μm positioning accuracy: 25μm alignment accuracy: 20μm
Focus lens: Standard matchingMachining range: 400X400mmMaximum processing speed: 6 m / SZ axis of the highest processing speed: 4 m / secMinimum line width: 150 mPositioning accuracy: 25 mPrecision: 20 m