In nearfield scanning optical microscopes, a tapered optical fiber placed in the vicinity of the surface couples out the evanescent components of the field that carry out information on the subwavelength details of the profile. However, the coupling between the local probe and the sample makes the topography difficult to retrieve from these data. In atomic force microscopes (AFMs) a tip having a radius of curvature of a few nanometers is in contact with the sample. This technique provides nanometric resolution; however, its implementation is restrictive to a laboratory environment. Optical profilometers based on far-field reflectance measurements [1–5] may circumvent the problems mentioned above. However, their lateral resolution is limited by diffraction. Moreover, accurate results can only be obtained if the scattering from the surface can be approximated by single reflections from horizontal tangent planes, which is relevant only when slopes of the profile are small.