It was confirmed that the ratio of

It was confirmed that the ratio of Mo to Si increased at the center of the Mo5Si3 thin film. This result is considerably different from the stoichiometric composition ratio of Mo:Si=5:3 and indicates that migration of Mo into the Mo5Si3 thin film also occurred. In addition, Si was detected from the Mo buffer layer.

結果 (中文) 1:

据证实，钼，硅的Mo5Si3薄膜中心的比例增加。这个结果是从钼的化学计量比组成相当不同：SI = 5:3表明迁移到Mo5Si3 Mo薄膜同时发生。此外，四是从钼缓冲层的检测。

結果 (中文) 2:

它被证实到 Si Mo 的比率增加的 Mo5Si3 薄膜中心。这一结果是大大不同于 Mo:Si 的化学计量学构成比例 = 5： 3 和指示那 Mo 迁移到 Mo5Si3 薄膜也发生。此外，Si Mo 缓冲层从检测到。