每台扩散泵以 GDQ-J600 型高真空气动挡板阀作为主抽阀，另设两个

每台扩散泵以 GDQ-J600 型高真空气动挡板阀作为主抽阀，另设两个 GDQ-J160 气动挡板阀作为前级阀和粗抽阀，通过三通与罗茨泵连接；

結果 (英文) 1:

Each of the diffusion pump to GDQ-J600 high vacuum pneumatic block valve as the main valve, two other GDQ-J160 pneumatic block valve preamp valves and gas valves, connected through a tee with the roots pump;

結果 (英文) 2:

Each diffusion pump to GDQ-J600 high vacuum flapper valve pneumatic valve as the main draw, separate two GDQ-J160 flapper valve pneumatic valve and as a pre-roughing valve, connected by a three-way with the Roots pump;

結果 (英文) 3:

Each diffusion pump with GDQ-J600 type high vacuum flapper valve as the main valve, another set of two GDQ-J160 pneumatic flapper valve as the valve before the class and roughing valve, through the three way connected with the roots pump;